Methods for fabricating light emitting devices

ABSTRACT

In an example, the present invention provides a method for fabricating a light emitting device configured as a Group III-nitride based laser device. The method also includes forming a gallium containing epitaxial material overlying the surface region of a substrate member. The method includes forming a p-type (Al,In,Ga)N waveguiding material overlying the gallium containing epitaxial material under a predetermined process condition. The method includes maintaining the predetermined process condition such that an environment surrounding a growth of the p-type (Al,In,Ga)N waveguide material is substantially a molecular N 2  rich gas environment. The method includes maintaining a temperature ranging from 725 C to 925 C during the formation of the p-type (Al,In,Ga)N waveguide material, although there may be variations. In an example, the predetermined process condition is substantially free from molecular H 2  gas.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is a continuation of U.S. application Ser. No. 14/315,687, filed Jun. 26, 2014, the entire contents of which are incorporated herein by reference in their entirety for all purposes.

BACKGROUND

In 1960, the laser was first demonstrated by Theodore H. Maiman at Hughes Research Laboratories in Malibu. This laser utilized a solid-state flash lamp-pumped synthetic ruby crystal to produce red laser light at 694 nm. By 1964, blue and green laser output was demonstrated by William Bridges at Hughes Aircraft utilizing a gas laser design called an Argon ion laser. The Ar-ion laser utilized a noble gas as the active medium and produce laser light output in the UV, blue, and green wavelengths including 351 nm, 454.6 nm, 457.9 nm, 465.8 nm, 476.5 nm, 488.0 nm, 496.5 nm, 501.7 nm, 514.5 nm, and 528.7 nm. The Ar-ion laser had the benefit of producing highly directional and focusable light with a narrow spectral output, but the wall plug efficiency was <0.1%, and the size, weight, and cost of the lasers were undesirable as well.

As laser technology evolved, more efficient lamp pumped solid state laser designs were developed for the red and infrared wavelengths, but these technologies remained a challenge for blue and green and blue lasers. As a result, lamp pumped solid state lasers were developed in the infrared, and the output wavelength was converted to the visible using specialty crystals with nonlinear optical properties. A green lamp pumped solid state laser had 3 stages: electricity powers lamp, lamp excites gain crystal which lases at 1064 nm, 1064 nm goes into frequency conversion crystal which converts to visible 532 nm. The resulting green and blue lasers were called “lamped pumped solid state lasers with second harmonic generation” (LPSS with SHG) had wall plug efficiency of ˜1%, and were more efficient than Ar-ion gas lasers, but were still too inefficient, large, expensive, fragile for broad deployment outside of specialty scientific and medical applications. Additionally, the gain crystal used in the solid state lasers typically had energy storage properties which made the lasers difficult to modulate at high speeds which limited its broader deployment.

To improve the efficiency of these visible lasers, high power diode (or semiconductor) lasers were utilized. These “diode pumped solid state lasers with SHG” (DPSS with SHG) had 3 stages: electricity powers 808 nm diode laser, 808 nm excites gain crystal, which lases at 1064 nm, 1064 nm goes into frequency conversion crystal which converts to visible 532 nm. The DPSS laser technology extended the life and improved the wall plug efficiency of the LPSS lasers to 5-10%, and further commercialization ensue into more high-end specialty industrial, medical, and scientific applications. However, the change to diode pumping increased the system cost and required precise temperature controls, leaving the laser with substantial size, power consumption while not addressing the energy storage properties which made the lasers difficult to modulate at high speeds.

As high power laser diodes evolved and new specialty SHG crystals were developed, it became possible to directly convert the output of the infrared diode laser to produce blue and green laser light output. These “directly doubled diode lasers” or SHG diode lasers had 2 stages: electricity powers 1064 nm semiconductor laser, 1064 nm goes into frequency conversion crystal which converts to visible 532 nm green light. These lasers designs are meant to improve the efficiency, cost and size compared to DPSS-SHG lasers, but the specialty diodes and crystals required make this challenging today. Additionally, while the diode-SHG lasers have the benefit of being directly modulate-able, they suffer from severe sensitivity to temperature which limits their application. Currently the only viable direct violet, blue, and green laser diode structures are fabricated from the wurtzite AlGaInN material system. However, limitations associated with III-nitride laser device epitaxial growth and fabrication are numerous and only become more severe with increased lasing wavelength. These and other limitations are described throughout the present specification and more particularly below.

From the above, improved techniques for manufacturing semiconductor laser diodes are highly desired.

SUMMARY

The invention is directed techniques, including a method of fabrication of optoelectronic devices from semiconductor wafers. In particular, the invention provides a method and device for emitting electromagnetic radiation using nonpolar or semipolar gallium containing substrates such as GaN, AlN, InN, InGaN, AlGaN, AlInGaN, and others. In other examples, novel structures are also included. The invention provides a method and device using a gallium and nitrogen containing substrate of the wurtzite crystal structure configured on any of the (0001), {11-20}, {10-10}, {10-11}, {20-21} and {30-31} families of crystal planes or an offcut of any of these planes according to one or more embodiments, but there can be other configurations. For example, it is possible under certain circumstances to produce gallium and nitrogen containing substrates with zinc blende crystal structures which would be applicable under this invention. Still more particularly, this invention provides a method for processing small semiconductor wafers or non-standard size such that all multiple wafers can be processed in parallel at the majority of steps in the fabrication process. The invention can be applied to optical devices such as lasers and light emitting diodes, among other devices.

This current invention provides a method for producing low resistance, low optical loss epitaxially grown p-type (Al,In,Ga)N cladding material with low Mg-doping levels at low growth temperatures. Herein the p-type (Al,In,Ga)N cladding material is epitaxially grown on top of n-type (Al,In,Ga)N layers under N₂ ambient conditions or ambient conditions consisting of a mixture of H₂ and N₂ gases. Under conventional art, it is believed that H₂ (i.e., hydrogen gas) ambient conditions are often required for growth of high quality low-resistance p-type (Al,In,Ga)N cladding. Based on first principle calculations by Neugebauer et al. (Neugebauer APL 68, 1829 (1996)), growth of p-type GaN under H₂ rich conditions lowers defect concentration while increases acceptor dopant incorporation. Our method for producing p-type (Al,In,Ga)N cladding layers shows that H₂ ambient conditions are not necessary for achieving high quality p-type (Al,In,Ga)N material. In fact, under identical growth rates, p-type cladding material grown under N₂ ambient conditions are shown to have higher charge and lower sheet resistance compared to p-type (Al,In,Ga)N cladding material grown under H₂ ambient conditions when grown at sufficiently low temperatures. Low temperature p-type (Al,In,Ga)N cladding material growth is desirable for long wavelength emitters to prevent thermal degradation of the high indium composition active region. Higher performance p-type cladding material grown under N₂ ambient conditions is attributed to lower [C] impurity levels compared to p-type (Al,In,Ga)N cladding material grown under H₂ ambient conditions. In a preferred embodiment, the p-type (Al,In,Ga)N cladding material of an optoelectronic device is epitaxially grown under pure N₂ ambient conditions at sufficiently low temperatures as not to cause thermal degradation in the high InN fraction active region. In alternative embodiment, the p-type (Al,In,Ga)N cladding material of an optoelectronic device is epitaxially grown under a mixture of N₂/H₂ ambient conditions at sufficiently low temperatures as not to cause thermal degradation in the high InN fraction active region. In both embodiments, the Mg-doping in p-type (Al,In,Ga)N cladding material is kept sufficiently low to maintain low optical absorption by the p-type layers.

Additional benefits are achieved over pre-existing techniques using the invention. In particular, the invention enables a cost-effective optical device for laser applications. In a specific embodiment, the present optical device can be manufactured in a relatively simple and cost effective manner. Depending upon the embodiment, the present apparatus and method can be manufactured using conventional materials and/or methods according to one of ordinary skill in the art. The present laser device uses a non-polar or semipolar gallium nitride material capable of achieving a blue or green laser device, among others. In one or more embodiments, the laser device is capable of emitting long wavelengths such as those ranging from about 480 nm to greater than about 540 nm, but can be others such as 540 nm to 660 nm and 420 nm to 480 nm. Depending upon the embodiment, one or more of these benefits may be achieved. Of course, there can be other variations, modifications, and alternatives.

A further understanding of the nature and advantages of the invention may be realized by reference to the latter portions of the specification and attached drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a simplified diagram illustrating (a) V_(f) measured at 14 kA/cm² and (b) slab optical loss for laser devices with different Mg-doping concentrations in the first 300 nm of the H₂ ambient grown p-type cladding layer in an example.

FIG. 2 is a simplified diagram illustrating Mg SIMS stack showing Mg concentrations for two different Cp₂Mg flow rates (5 and 10 sccm) in an example (under nominally identical rates, the Mg incorporation rate between N₂ ambient and H₂ ambient growth p-type GaN is comparable).

FIG. 3 is a simplified diagram illustrating sheet resistance and carrier concentration measured for p-type GaN grown under H₂ ambient 950 C temperature, H₂ ambient 900 C temperature, N₂ ambient 950 C temperature, and N₂ ambient 900 C temperature conditions in an example.

FIG. 4 is a simplified diagram illustrating [C], [Mg], and [O] levels measured from p-type GaN grown under 900 C temperature H₂ ambient, 950 C temperature H₂ ambient, and 900 C temperature N₂ ambient conditions in an example.

FIG. 5 is a simplified diagram illustrating V_(f) measured at 14 kA/cm² and slab optical loss values for laser devices with different Mg-doping profiles in the p-type cladding layers grown under H₂ and N₂ ambient conditions in an example (the relative Mg concentration increases from left to right).

FIG. 6 is a simplified diagram of a flow chart illustrating primary steps in fabricating a nitride semiconductor device and the method of forming an epitaxial wafer according to an example.

FIG. 7 is an illustration of a simplified schematic cross-sectional diagram illustrating a state of the art laser diode structure in an example.

FIG. 8 is an illustration of a perspective view diagram of a laser diode according to an example.

DETAILED DESCRIPTION OF THE INVENTION

This invention presents a method fabricating a III-nitride optical P-N junction device e.g., laser, LED. What follows is a general description of the typical configuration and fabrication of these devices.

As we discovered, extending emission wavelength from the violet into the green spectra region often requires increasing InN fraction in the active region. Due to the large lattice mismatch between GaN and InN, high InN fractions in the active region typically results in low chemical stability of the active layers. Thermal degradation via thermal annealing during the subsequent p-type (Al,In,Ga)N layer growth has been reported by various groups. Moreover, this phenomenon has been universally observed regardless of growth orientation. It is therefore desirable to maintain a low post-active region growth thermal budget.

In addition to growth challenges associated with long wavelength laser devices are waveguide design issues. Refractive index dispersion leads to a decrease in refractive index contrast between optical waveguide layers with increasing wavelength. For the same waveguide material, the modal confinement in the active region decreases with increasing emission wavelength. This has a concomitant effect on optical loss, since overlap with passive regions will increase as well. In particular, increased loss from activated Mg acceptors can severely degrade laser diode performance. It is therefore desirable to have p-type cladding layers with low Mg concentrations while maintaining acceptable diode voltages.

Growth of high quality p-type cladding material with low resistance and low optical loss, however, is particularly difficult under the constraints of post-active region thermal budget. Lower temperature and/or high growth rate p-type cladding growth typically results in higher [C] impurity concentrations. Since [C] is often regarded as a deep level trap, Mg-doping in these layers must be kept relatively high in order to achieve acceptable diode resistance. In laser diodes, this comes at the expense of optical loss.

In an example, devices include a gallium and nitrogen containing substrate (e.g., GaN) comprising a surface region oriented in either a semipolar or non-polar configuration, but can be others. The device also has a gallium and nitrogen containing material comprising InGaN overlying the surface region. In a specific embodiment, the present laser device can be employed in either a semipolar or non-polar gallium containing substrate, as described below. As used herein, the term “substrate” can mean the bulk substrate or can include overlying growth structures such as a gallium and nitrogen containing epitaxial region, or functional regions such as n-type GaN, combinations, and the like. We have also explored epitaxial growth and cleave properties on semipolar crystal planes oriented between the nonpolar m-plane and the polar c-plane. In particular, we have grown on the {30-31} and {20-21} families of crystal planes. We have achieved promising epitaxy structures and cleaves that will create a path to efficient laser diodes operating at wavelengths from about 400 nm to green, e.g., 500 nm to 540 nm. These results include bright blue epitaxy in the 450 nm range, bright green epitaxy in the 520 nm range, and smooth cleave planes orthogonal to the projection of the c-direction. It is desirable to align the laser cavities parallel to the projection of the c-direction for maximum gain on this family of crystal planes.

In a specific embodiment, the gallium nitride substrate member is a bulk GaN substrate characterized by having a semipolar or non-polar crystalline surface region, but can be others. In a specific embodiment, the bulk nitride GaN substrate comprises nitrogen and has a surface dislocation density between about 10E5 cm⁻² and about 10E7 cm⁻² or below 10E5 cm⁻². The nitride crystal or wafer may comprise Al_(x)In_(y)Ga_(1-x-y)N, where 0≤x, y, x+y≤1. In one specific embodiment, the nitride crystal comprises GaN. In one or more embodiments, the GaN substrate has threading dislocations, at a concentration between about 10E5 cm⁻² and about 10E8 cm⁻², in a direction that is substantially orthogonal or oblique with respect to the surface. As a consequence of the orthogonal or oblique orientation of the dislocations, the surface dislocation density is between about 10E5 cm⁻² and about 10E7 cm⁻² or below about 10E5 cm⁻². In a specific embodiment, the device can be fabricated on a slightly off-cut semipolar substrate as described in U.S. Ser. No. 12/749,466 filed Mar. 29, 2010, which claims priority to U.S. Provisional No. 61/164,409 filed Mar. 28, 2009, both of which are commonly assigned and hereby incorporated by reference herein.

The substrate typically is provided with one or more of the following epitaxially grown elements, but is not limiting:

-   -   an n-GaN cladding region with a thickness of 50 nm to about 6000         nm with a Si or oxygen doping level of about 5E16 cm⁻³ to 1E19         cm⁻³     -   an InGaN region of a high indium content and/or thick InGaN         layer(s) or Super SCH region;     -   a higher bandgap strain control region overlying the InGaN         region;     -   optionally, an SCH region overlying the InGaN region;     -   multiple quantum well active region layers comprised of three to         five or four to six 3.0-5.5.0 nm InGaN quantum wells separated         by 1.5-10.0 nm GaN barriers     -   optionally, a p-side SCH layer comprised of InGaN with molar a         fraction of indium of between 1% and 10% and a thickness from 15         nm to 100 nm     -   an electron blocking layer comprised of AlGaN with molar         fraction of aluminum of between 5% and 20% and thickness from 10         nm to 15 nm and doped with Mg.     -   a p-GaN cladding layer with a thickness from 400 nm to 1000 nm         with Mg doping level of 5E17 cm⁻³ to 1E19 cm⁻³     -   a p++-GaN contact layer with a thickness from 20 nm to 40 nm         with Mg doping level of 1E20 cm⁻³ to 1E21 cm⁻³

Typically each of these regions is formed using at least an epitaxial deposition technique of metal organic chemical vapor deposition (MOCVD), molecular beam epitaxy (MBE), or other epitaxial growth techniques suitable for GaN growth. The active region can include one to twenty quantum well regions according to one or more embodiments. As an example following deposition of the n-type Al_(u)In_(v)Ga_(1-u-v)N layer for a predetermined period of time, so as to achieve a predetermined thickness, an active layer is deposited. The active layer may comprise a single quantum well or a multiple quantum well, with 2-10 quantum wells. The quantum wells may comprise InGaN wells and GaN barrier layers. In other embodiments, the well layers and barrier layers comprise Al_(w)In_(x)Ga_(1-w-x)N and Al_(y)In_(z)Ga_(1-y-z)N, respectively, where 0≤w, x, y, z, w+x, y+z≤1, where w<u, y and/or x>v, z so that the bandgap of the well layer(s) is less than that of the barrier layer(s) and the n-type layer. The well layers and barrier layers may each have a thickness between about 1 nm and about 15 nm. In another embodiment, the active layer comprises a double heterostructure, with an InGaN or AlwInxGa1-w-xN layer about 10 nm to 100 nm thick surrounded by GaN or Al_(y)In_(z)Ga_(1-y-z)N layers, where w<u, y and/or x>v, z. The composition and structure of the active layer are chosen to provide light emission at a preselected wavelength. The active layer may be left undoped (or unintentionally doped) or may be doped n-type or p-type.

The active region can also include an electron blocking region, and a separate confinement heterostructure. In some embodiments, an electron blocking layer is preferably deposited. The electron-blocking layer may comprise Al_(s)In_(t)Ga_(1-s-t)N, where 0≤s, t, s+t≤1, with a higher bandgap than the active layer, and may be doped p-type or the electron blocking layer comprises an AlGaN/GaN super-lattice structure, comprising alternating layers of AlGaN and GaN. Alternatively, there may be no electron blocking layer. As noted, the p-type gallium nitride structure, is deposited above the electron blocking layer and active layer(s). The p-type layer may be doped with Mg, to a level between about 10E16 cm-3 and 10E22 cm-3, and may have a thickness between about 5 nm and about 1000 nm. The outermost 1-50 nm of the p-type layer may be doped more heavily than the rest of the layer, so as to enable an improved electrical contact. These and other features of the present invention can be found throughout the present specification and more particularly below.

In an example, the present invention provides a method for fabricating a light emitting device configured as a Group III-nitride based laser device. The method includes providing a substrate member comprising a gallium and nitrogen containing material and a surface region. The method also includes forming a gallium containing epitaxial material overlying the surface region. The method includes forming a p-type (Al,In,Ga)N waveguiding material overlying the gallium containing epitaxial material under a predetermined process condition. The method includes maintaining the predetermined process condition such that an environment surrounding a growth of the p-type (Al,In,Ga)N waveguide material is substantially a molecular N₂ rich gas environment. The method includes maintaining a temperature ranging from 725 C to 925 C during the formation of the p-type (Al,In,Ga)N waveguide material, although there may be variations. In an example, the predetermined process condition is substantially free from molecular H₂ gas. Of course, there can be other variations, modifications, and alternatives.

In an example, the p-type (Al,In,Ga)N waveguiding material is grown under the predetermined process consisting of the substantially molecular N₂ rich gas environment and the molecular H₂ to N₂ gas flow ratio into the reactor is less than 1 to 10; wherein the p-type (Al,In,Ga)N waveguiding material is grown at the temperature range during the predetermined process; wherein the p-type (Al,In,Ga)N waveguiding material is characterized by a carbon impurity concentration of less than 1E17 atoms per cubic centimeter when grown at the temperature range. In an example, the p-type (Al,In,Ga)N waveguiding material is formed using a trimethylgallium metallorganic precursor and/or a triethylgallium metallorganic precursor with a growth rate greater than 0.75 angstrom per second and less than 5. angstrom per second; wherein the p-type (Al,In,Ga)N waveguiding material is formed at the predetermined condition including an ammonia containing species, whereupon the ammonia containing species to molecular N₂ gas ratio is greater than 1:5 but less than 2:3; and further comprising forming an n-type gallium nitride material below the p-type (Al,In,Ga)N waveguiding material, the p-type (Al,In,Ga)N waveguiding material is configured as a cladding region.

In an example, the method also includes forming an active region overlying the gallium containing epitaxial material, the active region comprising of a plurality of quantum-well regions, each of the quantum-well regions being configured with a barrier material; and further comprising forming an active region overlying the gallium containing epitaxial material, the active region comprising of a plurality of quantum-well regions, each of the quantum-well regions being configured with a barrier material; and further comprising forming a p-type (Al,In,Ga)N p-type electron blocking layer overlying the active region.

The method can also include forming an active region overlying the gallium containing epitaxial material, the active region comprising of a plurality of quantum-well regions, each of the quantum-well regions being configured with a barrier material; and further comprising an n-type waveguiding material underneath the active region in an example.

In an alternative example, the method includes forming an active region overlying the gallium containing epitaxial material, the active region comprising of a plurality of quantum-well regions, each of the quantum-well regions being configured with a barrier material; and wherein the n-type waveguiding material is comprised of a material with an refractive index lower than the average refractive index of the active region but larger than the n-type cladding material such as indium gallium nitride with indium nitride alloy composition greater than 2% but less than 15%.

In an example, the method includes forming an active region overlying the gallium containing epitaxial material, the active region comprising of a plurality of quantum-well regions, each of the quantum-well regions being configured with a barrier material; and wherein the n-type cladding material is comprised of a material with an refractive index lower than that of the n-type waveguiding material, the material being at least one of an aluminum gallium nitride with aluminum nitride alloy compositions greater than 0% but less than 20%.

In an example, the method includes forming an active region overlying the gallium containing epitaxial material, the active region comprising of a plurality of quantum-well regions, each of the quantum-well regions being configured with a barrier material; and further comprising a p-type waveguiding material overlying the active region; and wherein the p-type waveguiding material is comprised of a material with an refractive index lower than the average refractive index of the active region but larger than the p-type cladding material such as indium gallium nitride with indium nitride alloy composition greater than 2% but less than 15%.

In an example, the method includes forming an active region overlying the gallium containing epitaxial material, the active region comprising of a plurality of quantum-well regions, each of the quantum-well regions being configured with a barrier material; and wherein the p-type cladding material is comprised of a material with an refractive index lower than that of the p-type waveguiding material such as aluminum gallium nitride with aluminum nitride alloy compositions greater than 0% but less than 20%.

In an example, the method includes forming an active region overlying the gallium containing epitaxial material, the active region comprising of a plurality of quantum-well regions, each of the quantum-well regions being configured with a barrier material; and further comprising an active region with defect suppression regions.

In an example, the p-type (Al,In,Ga)N waveguiding material has a thickness from 400 to 1000 nanometer with Mg doping level of 5E17 to 2E19 atoms per cubic centimeter, the waveguiding material being configured as a waveguiding material and a cladding region.

In an example, the method includes forming a highly Mg doped p++ contact layer with a thickness greater than 5 nanometer but lower than 50 nanometer overlying the p-type (Al,In,Ga)N waveguiding material.

In an example, the method further includes introducing a metallorganic or a combination of metallogranic precursors consisting of a group including trimethylgallium, triethylgallium, trimethylaluminum, trimethylindium, or Bis(cyclopentadienyl)magnesium in forming the p-type (Al,In,Ga)N waveguiding material; and wherein the p-type (Al,In,Ga)N waveguiding material is grown using MOCVD or MBE.

In an example, the substrate is configured on a nonpolar (10-10), (11-20), or a related miscut orientation. In an example, the substrate is configured on polar (0001) or (000-1), or a related miscut orientation. In an example, the substrate is configured on a semipolar (20-21), (20-2-1), (30-31), (30-3-1), (11-22), or a related miscut orientation.

In an example, the method can include a misfit dislocation blocking feature configured to the substrate. In an example, the method includes forming a conductive oxide material comprising either an indium tin oxide material or a zinc oxide material overlying the p-type (Al,In,Ga)N material waveguiding material; and forming a metallization layer selected from at least one of Au, Ni, Pd, Al, Pt, or Ti overlying the conductive oxide layer. In an example, the diode voltage of the device is less than 6.75 V at a current density of 14 kA/cm2. In an example, the area on wafer affected by dark spot defects is less than 10%. In an example, the slab optical loss of the device is less than 10 cm-1.

In an example, the invention provides a method for fabricating a light emitting device configured as a Group III-nitride based laser device. In an example, the method includes providing a substrate member comprising a gallium and nitrogen containing material and a surface region and forming a gallium containing epitaxial material overlying the surface region. In an example, the method includes forming a p-type (Al,In,Ga)N waveguiding material overlying the gallium containing epitaxial material under a predetermined process condition. The method includes maintaining the predetermined process condition such that an environment surrounding a growth of the p-type (Al,In,Ga)N waveguide material is substantially a molecular N₂ rich gas environment. In an example, the method includes maintaining a temperature ranging from 725 C to 925 C during the formation of the p-type (Al,In,Ga)N waveguide material. In an example, the predetermined process condition is substantially free from molecular H₂ gas. In an example, the predetermined process condition comprising initiating formation under the substantially molecular N₂ rich gas ambient condition for a first thickness of material and forming a second thickness of material under a non-substantially molecular N₂ rich gas environment.

In an alternative example, the invention provides a method for fabricating a light emitting device configured as a Group III-nitride based laser device. In an example, the method includes providing a substrate member comprising a gallium and nitrogen containing material and a surface region. In an example, the method includes forming a gallium containing epitaxial material overlying the surface region and forming a p-type (Al,In,Ga)N waveguiding material overlying the gallium containing epitaxial material under a predetermined process condition, the predetermined process condition being substantially free from molecular H₂ gas. In an example, the method includes maintaining the predetermined process condition such that an environment surrounding a growth of the p-type (Al,In,Ga)N waveguide material is substantially a molecular N₂ rich gas environment, while maintaining a temperature ranging from 725 C to 925 C during the formation of the p-type (Al,In,Ga)N waveguide material; and further comprising forming an n-type gallium nitride material below the p-type (Al,In,Ga)N waveguiding material, the p-type (Al,In,Ga)N waveguiding material is configured as a cladding region. In an example, the method includes forming an active region overlying the gallium containing epitaxial material, the active region comprising of a plurality of quantum-well regions, each of the quantum-well regions being configured with a barrier material and forming an active region overlying the gallium containing epitaxial material, the active region comprising of a plurality of quantum-well regions, each of the quantum-well regions being configured with a barrier material; and further comprising forming a p-type (Al,In,Ga)N p-type electron blocking layer overlying the active region. In an example, the p-type (Al,In,Ga)N waveguiding material is grown under the predetermined process consisting of the substantially molecular N₂ rich gas environment and the molecular H₂ to N₂ gas flow ratio into the reactor is less than 1 to 10; wherein the p-type (Al,In,Ga)N waveguiding material is grown at the temperature range during the predetermined process; wherein the p-type (Al,In,Ga)N waveguiding material is characterized by a carbon impurity concentration of less than 1E17 atoms per cubic centimeter when grown at the temperature range. In an example, the p-type (Al,In,Ga)N waveguiding material is formed using a trimethylgallium metallorganic precursor and/or a triethylgallium metallorganic precursor with a growth rate greater than 0.75 angstrom per second and less than 5.0 angstrom per second. In an example, the p-type (Al,In,Ga)N waveguiding material is formed at the predetermined condition including an ammonia containing species, whereupon the ammonia containing species to molecular N₂ gas ratio is greater than 1:5 but less than 2:3. In an example, the substrate is configured on a nonpolar (10-10), (11-20), or a related miscut orientation or wherein the substrate is configured on polar (0001) or (000-1), or a related miscut orientation or wherein the substrate is configured on a semipolar (20-21), (20-2-1), (30-31), (30-3-1), (11-22), or a related miscut orientation. Further details of the present techniques can be found throughout the present specification and more particularly below.

FIG. 1 shows (a) V_(f) measured at 14 kA/cm² and (b) slab optical loss for laser devices with different Mg-doping concentrations in the first 300 nm of the H₂ ambient grown p-type cladding layer. Slab optical loss increases as device voltage is reduced via increased Mg-doping.

This inventions provides a method for fabricating high quality p-type (Al,In,Ga)N at low temperatures. By growing p-type (Al,In,Ga)N layers under N₂ ambient conditions, lower sheet resistance and higher carrier concentrations can be achieved.

FIG. 2 is a simplified diagram illustrating Mg SIMS stack showing Mg concentrations for two different Cp₂Mg flow rates (5 and 10 sccm) in an example. As shown, under nominally identical rates, the Mg incorporation rate between N₂ ambient and H₂ ambient growth p-type GaN is comparable.

FIG. 3 shows Sheet resistance and carrier concentration measured for p-type GaN grown under H₂ ambient 950 C temperature, H₂ ambient 900 C temperature, N₂ ambient 950 C temperature, and N₂ ambient 900 C temperature conditions. 900 C temperature H₂ ambient grown p-type (Al,In,Ga)N is characterized by high sheet resistance and low carrier concentrations. By increasing the growth temperature, higher quality p-type (Al,In,Ga)N can be achieved. However, comparable performance p-type (Al,In,Ga)N material can also be achieved by growing under low temperature N₂ ambient conditions. Increasing growth temperature under N₂ ambient conditions does not further improve p-type (Al,In,Ga)N quality.

FIG. 4 compares carbon, magnesium, and oxygen levels measured from p-type GaN grown under 900 C temperature H₂ ambient, 950 C temperature H₂ ambient, and 900 C temperature N₂ ambient conditions. All three conditions exhibit comparable Mg and O levels when grown under nominally identical growth rates. Carbon levels, however, are significantly higher for low temperature H₂ ambient p-type GaN, while low temperature N₂ ambient p-type GaN and high temperature H₂ ambient p-type GaN exhibit comparable carbon levels.

Lower carbon levels for low temperature N₂ ambient p-type layers enables growth of high quality p-type (Al,In,Ga)N cladding layers with lower Mg doping concentrations. FIG. 5 shows V_(f) measured at 14 kA/cm2 and slab optical loss values for laser devices with different Mg-doping profiles in the p-type cladding layers grown under H₂ and N₂ ambient conditions. The relative Mg concentration increases from left to right. Optical loss decreases with decreasing Mg concentrations. Mg concentrations in p-type cladding layers grown under H₂ ambient conditions can only be lowered to intermediate Mg concentrations before Vf becomes unacceptably high. Mg concentrations in p-type cladding layers grown under N₂ ambient conditions, however, can be lowered much further before Vf increase is observed.

This invention resolves two main epitaxial growth issues regarding long wavelength laser devices:

-   -   1. Degradation of high InN content active regions due to thermal         annealing during growth of post-active region p-type (Al,In,Ga)N         waveguiding and cladding layers.     -   2. High optical loss due to modal overlap with passive p-type         (Al,In,Ga)N waveguiding and cladding layers.

FIG. 6 is a simplified diagram of a flow chart illustrating primary steps in fabricating a nitride semiconductor device and the method of forming an epitaxial wafer according to an example. This diagram is merely an example, which should not unduly limit the scope of the claims herein. One of ordinary skill in the art would recognize many alternatives, variations, and modifications in light of the present disclosure. In this example, the substrate wafer is placed into the reactor and brought up to temperatures 1175 C>T>700 C under either H₂ or N₂ rich ambient conditions. N-type cladding and/or waveguiding (Al,In,Ga)N material is grown under H₂ or N₂ rich ambient conditions. Light emitting active material, typically consisting a plurality of InGaN quantum-wells and (Al,In,Ga)N quantum-barriers, is grown on top of the n-type cladding/waveguiding material. In some practices, an p-type (Al,In,Ga)N material (electron blocking layer) with bandgap larger than that of the quantum-well and quantum-barrier is grown on top of the light emitting active material. P-type cladding and/or waveguiding (Al,In,Ga)N material is then subsequently grown. In this specific example, the p-type cladding and/or waveguiding (Al,In,Ga)N material is grown under N₂ rich conditions with growth temperatures in the ranges of 700 C>T>950 C. The method of our invention is most useful within this temperature range. After the p-type cladding/waveguiding (Al,In,Ga)N material growth, the epitaxial structure is capped with a Mg doped (Al,In,Ga)N p-contact layer with thickness in the range of 5 to 45 nm. After the p-contact layer is grown, the temperature in the reactor is ramped down to room temperature and the substrate is unloaded from the reactor. Laser device patterns, including electrode metallization, are then made on the wafers using standard microelectronic fabrication processes.

In a preferred embodiment, the p-type (Al,In,Ga)N cladding material of an optoelectronic device is epitaxially grown under pure N₂ ambient conditions at sufficiently low temperatures as not to cause thermal degradation in the high InN fraction active region. In a second embodiment, the p-type (Al,In,Ga)N cladding material of an optoelectronic device is epitaxially grown under a mixture of N₂/H₂ ambient conditions at sufficiently low temperatures as not to cause thermal degradation in the high InN fraction active region. In a third embodiment, portions of the p-type (Al,In,Ga)N cladding material can be grown under a mixture of N₂/H₂ ambient conditions or full N₂ ambient conditions. For example, part of the p-type (Al,In,Ga)N cladding material can be grown under low temperature conditions under N₂ ambient conditions to keep [C] impurity levels low, while other portions of the p-type (Al,In,Ga)N cladding material are grown under high temperature conditions where [C] impurity levels are not an issue. In this embodiment, the overall thermal budget is kept low so as not to induce defect formation in the quantum-well active region. In all embodiments, the Mg-doping in p-type (Al,In,Ga)N cladding material is kept sufficiently low to maintain low optical absorption by the p-type layers.

Low temperature p-type (Al,In,Ga)N cladding layers grown under N₂ ambient conditions can be combined with other technologies to produce high performance lasers. In an embodiment, a laser device with N₂ ambient grown p-type (Al,In,Ga)N cladding material can be grown on semipolar orientation substrates that have been patterned with dislocation blocking features. These features can be patterned lithographically and then dry etched, or can be laser scribed into the wafers. In another embodiment, laser device with defect suppression layers in the active region can be combined with p-type (Al,In,Ga)N cladding material grown under N₂ ambient conditions to produce high quality, low defect epi-structures.

FIG. 7 is a simplified schematic cross-sectional diagram illustrating a laser diode structure according to embodiments of the present disclosure. This diagram is merely an example, which should not unduly limit the scope of the claims herein. One of ordinary skill in the art would recognize other variations, modifications, and alternatives in light of the present disclosure. As shown, the laser device includes gallium nitride substrate 703, which has an underlying n-type metal back contact region 701. In an embodiment, the metal back contact region is made of a suitable material such as those noted below and others. In an embodiment, the device also has an overlying n-type gallium nitride layer 705, an active region 707, and an overlying p-type gallium nitride layer structured as a laser stripe region 711 (or p-type waveguiding material). Herein the p-type gallium nitride 711 is grown under N₂ rich ambient conditions and at sufficiently low temperature as not to thermally degrade the high indium composition active region. Additionally, the device also includes an n-side separate confinement hetereostructure (SCH) 706, p-side guiding layer or SCH 708, p-AlGaN EBL 709, among other features. In an embodiment, the device also has a p++ type gallium nitride material 713 to form a contact region. Further details of the contact region can be found throughout the present specification and more particularly below.

In an embodiment, the device also has an overlying n-type gallium nitride layer 705, an active region 707, and an overlying p-type gallium nitride layer structured as a laser stripe region 711. Additionally, the device also includes an n-side separate confinement hetereostructure (SCH) 706, p-side guiding layer or SCH 708, p-AlGaN EBL 709, among other features. In an embodiment, the device also has a p++ type gallium nitride material 713 to form a contact region. In an embodiment, the p++ type contact region has a suitable thickness and may range from about 10 nm to 50 nm, or other thicknesses. In an embodiment, the doping level can be higher than the p-type cladding region and/or bulk region. In an embodiment, the p++ type region has doping concentration ranging from about 10¹⁹ to 10²¹Mg/cm³, and others. The p++ type region preferably causes tunneling between the semiconductor region and overlying metal contact region. In an embodiment, each of these regions is formed using at least an epitaxial deposition technique of metal organic chemical vapor deposition (MOCVD), molecular beam epitaxy (MBE), or other epitaxial growth techniques suitable for GaN growth. In an embodiment, the epitaxial layer is a high quality epitaxial layer overlying the n-type gallium nitride layer. In some embodiments the high quality layer is doped, for example, with Si or O to form n-type material, with a dopant concentration between about 10¹⁶ cm⁻³ and 10²⁰ cm⁻³.

The device has a laser stripe region formed overlying a portion of the off-cut crystalline orientation surface region. As example, FIG. 8 is a simplified schematic diagram of semipolar laser diode with the cavity aligned in the projection of c-direction with cleaved or etched mirrors. The laser stripe region is characterized by a cavity orientation substantially in a projection of a c-direction, which is substantially normal to an a-direction. The laser strip region has a first end 107 and a second end 109 and is formed on a projection of a c-direction on a {20-21} gallium and nitrogen containing substrate having a pair of cleaved mirror structures, which face each other. The first cleaved facet comprises a reflective coating and the second cleaved facet comprises no coating, an antireflective coating, or exposes gallium and nitrogen containing material. The first cleaved facet is substantially parallel with the second cleaved facet. The first and second cleaved facets are provided by a scribing and breaking process according to an embodiment or alternatively by etching techniques using etching technologies such as reactive ion etching (ME), inductively coupled plasma etching (ICP), or chemical assisted ion beam etching (CAIBE), or other method. The first and second mirror surfaces each comprise a reflective coating. The coating is selected from silicon dioxide, hafnia, and titania, tantalum pentoxide, zirconia, including combinations, and the like. Depending upon the design, the mirror surfaces can also comprise an anti-reflective coating.

In a specific embodiment, the method of facet formation includes subjecting the substrates to a laser for pattern formation. In a preferred embodiment, the pattern is configured for the formation of a pair of facets for one or more ridge lasers. In a preferred embodiment, the pair of facets face each other and are in parallel alignment with each other. In a preferred embodiment, the method uses a UV (355 nm) laser to scribe the laser bars. In a specific embodiment, the laser is configured on a system, which allows for accurate scribe lines configured in one or more different patterns and profiles. In one or more embodiments, the laser scribing can be performed on the back-side, front-side, or both depending upon the application. Of course, there can be other variations, modifications, and alternatives.

In a specific embodiment, the method uses backside laser scribing or the like. With backside laser scribing, the method preferably forms a continuous line laser scribe that is perpendicular to the laser bars on the backside of the GaN substrate. In a specific embodiment, the laser scribe is generally 15-20 um deep or other suitable depth. Preferably, backside scribing can be advantageous. That is, the laser scribe process does not depend on the pitch of the laser bars or other like pattern. Accordingly, backside laser scribing can lead to a higher density of laser bars on each substrate according to a preferred embodiment. In a specific embodiment, backside laser scribing, however, may lead to residue from the tape on one or more of the facets. In a specific embodiment, backside laser scribe often requires that the substrates face down on the tape. With front-side laser scribing, the backside of the substrate is in contact with the tape. Of course, there can be other variations, modifications, and alternatives.

Laser scribe Pattern: The pitch of the laser mask is about 200 um, but can be others. The method uses a 170 um scribe with a 30 um dash for the 200 um pitch. In a preferred embodiment, the scribe length is maximized or increased while maintaining the heat affected zone of the laser away from the laser ridge, which is sensitive to heat.

Laser scribe Profile: A saw tooth profile generally produces minimal facet roughness. It is believed that the saw tooth profile shape creates a very high stress concentration in the material, which causes the cleave to propagate much easier and/or more efficiently.

In a specific embodiment, the method of facet formation includes subjecting the substrates to mechanical scribing for pattern formation. In a preferred embodiment, the pattern is configured for the formation of a pair of facets for one or more ridge lasers. In a preferred embodiment, the pair of facets face each other and are in parallel alignment with each other. In a preferred embodiment, the method uses a diamond tipped scribe to physically scribe the laser bars, though as would be obvious to anyone learned in the art a scribe tipped with any material harder than GaN would be adequate. In a specific embodiment, the laser is configured on a system, which allows for accurate scribe lines configured in one or more different patterns and profiles. In one or more embodiments, the mechanical scribing can be performed on the back-side, front-side, or both depending upon the application. Of course, there can be other variations, modifications, and alternatives.

In a specific embodiment, the method uses backside scribing or the like. With backside mechanical scribing, the method preferably forms a continuous line scribe that is perpendicular to the laser bars on the backside of the GaN substrate. In a specific embodiment, the laser scribe is generally 15-20 um deep or other suitable depth. Preferably, backside scribing can be advantageous. That is, the mechanical scribe process does not depend on the pitch of the laser bars or other like pattern. Accordingly, backside scribing can lead to a higher density of laser bars on each substrate according to a preferred embodiment. In a specific embodiment, backside mechanical scribing, however, may lead to residue from the tape on one or more of the facets. In a specific embodiment, backside mechanical scribe often requires that the substrates face down on the tape. With front-side mechanical scribing, the backside of the substrate is in contact with the tape. Of course, there can be other variations, modifications, and alternatives.

It is well known that etch techniques such as chemical assisted ion beam etching (CAIBE), inductively coupled plasma (ICP) etching, or reactive ion etching (RIE) can result in smooth and vertical etched sidewall regions, which could serve as facets in etched facet laser diodes. In the etched facet process a masking layer is deposited and patterned on the surface of the wafer. The etch mask layer could be comprised of dielectrics such as silicon dioxide (SiO₂), silicon nitride (SixNy), a combination thereof or other dielectric materials. Further, the mask layer could be comprised of metal layers such as Ni or Cr, but could be comprised of metal combination stacks or stacks comprising metal and dielectrics. In another approach, photoresist masks can be used either alone or in combination with dielectrics and/or metals. The etch mask layer is patterned using conventional photolithography and etch steps. The alignment lithography could be performed with a contact aligner or stepper aligner. Such lithographically defined mirrors provide a high level of control to the design engineer. After patterning of the photoresist mask on top of the etch mask is complete, the patterns in then transferred to the etch mask using a wet etch or dry etch technique. Finally, the facet pattern is then etched into the wafer using a dry etching technique selected from CAIBE, ICP, RIE and/or other techniques. The etched facet surfaces must be highly vertical of between about 87 and 93 degrees or between about 89 and 91 degrees from the surface plane of the wafer. The etched facet surface region must be very smooth with root mean square roughness values of less than 50 nm, 20 nm, 5 nm, or 1 nm. Lastly, the etched must be substantially free from damage, which could act as nonradiative recombination centers and hence reduce the COMD threshold. CAIBE is known to provide very smooth and low damage sidewalls due to the chemical nature of the etch, while it can provide highly vertical etches due to the ability to tilt the wafer stage to compensate for any inherent angle in etch.

The laser stripe is characterized by a length and width. The length ranges from about 50 microns to about 3000 microns, but is preferably between 10 microns and 400 microns, between about 400 microns and 800 microns, or about 800 microns and 1600 microns, but could be others. The stripe also has a width ranging from about 0.5 microns to about 50 microns, but is preferably between 0.8 microns and 2.5 microns for single lateral mode operation or between 2.5 um and 50 um for multi-lateral mode operation, but can be other dimensions. In a specific embodiment, the present device has a width ranging from about 0.5 microns to about 1.5 microns, a width ranging from about 1.5 microns to about 3.0 microns, a width ranging from 3.0 microns to about 50 microns, and others. In a specific embodiment, the width is substantially constant in dimension, although there may be slight variations. The width and length are often formed using a masking and etching process, which are commonly used in the art.

The laser stripe is provided by an etching process selected from dry etching or wet etching. The device also has an overlying dielectric region, which exposes a p-type contact region. Overlying the contact region is a contact material, which may be metal or a conductive oxide or a combination thereof. The p-type electrical contact may be deposited by thermal evaporation, electron beam evaporation, electroplating, sputtering, or another suitable technique. Overlying the polished region of the substrate is a second contact material, which may be metal or a conductive oxide or a combination thereof and which comprises the n-type electrical contact. The n-type electrical contact may be deposited by thermal evaporation, electron beam evaporation, electroplating, sputtering, or another suitable technique.

P-type (Al,In,Ga)N layers grown epitaxially by MOCVD typically require a H₂ ambient condition. It is universally believed that H₂ ambient growth conditions are necessary to achieve low resistance p-type (Al,In,Ga)N. Our invention shows that at low temperatures, p-type (Al,In,Ga)N grown under N₂ ambient conditions has lower resistance and higher carrier concentration than p-type (Al,In,Ga)N grown under H₂ ambient conditions.

Low temperature p-type (Al,In,Ga)N is typically desired in long wavelength emission devices since high InN content active regions are prone to thermal degradation during growth of post-active region layers. High temperature p-type (Al,In,Ga)N growth is problematic for laser diode devices in particular due to the necessity of a sufficiently thick p-type optical waveguiding material. Long growth times at elevated temperature required for thick p-type (Al,In,Ga)N deposition of the cladding leads to degradation of the light emitting layers. The p-type (Al,In,Ga)N cladding material can be grown at low temperatures, but this usually results in lower quality p-type cladding material due to higher impurity concentrations that can compensate acceptors. In order to keep diode voltage low, Mg-doping concentrations must be increased. In laser diodes, this comes at the expense of optical loss.

As used herein, the term GaN substrate is associated with Group III-nitride based materials including GaN, InGaN, AlGaN, or other Group III containing alloys or compositions that are used as starting materials. Such starting materials include polar GaN substrates (i.e., substrate where the largest area surface is nominally an (h k l) plane wherein h=k=0, and l is non-zero), non-polar GaN substrates (i.e., substrate material where the largest area surface is oriented at an angle ranging from about 80-100 degrees from the polar orientation described above towards an (h k l) plane wherein l=0, and at least one of h and k is non-zero) or semipolar GaN substrates (i.e., substrate material where the largest area surface is oriented at an angle ranging from about +0.1 to 80 degrees or 110-179.9 degrees from the polar orientation described above towards an (h k l) plane wherein l=0, and at least one of h and k is non-zero).

In an example, the present device can be enclosed in a suitable package. Such package can include those such as in TO-38 and TO-56 headers. Other suitable package designs and methods can also exist, such as TO-9 or flat packs where fiber optic coupling is required and even non-standard packaging. In a specific embodiment, the present device can be implemented in a co-packaging configuration such as those described in U.S. Publication No. 2010/0302464, which is incorporated by reference herein.

In other embodiments, the present laser device can be configured in a variety of applications. Such applications include laser displays, metrology, communications, health care and surgery, information technology, and others. As an example, the present laser device can be provided in a laser display such as those described in U.S. application Ser. No. 12/789,303 filed on May 27, 2010, which is incorporated by reference herein.

As used herein, the term “substrate” can mean the bulk substrate or can include overlying growth structures such as a gallium and nitrogen containing epitaxial region, or functional regions such as n-type GaN, combinations, and the like. For semipolar, the present method and structure includes a stripe oriented perpendicular to the c-axis, an in-plane polarized mode is not an Eigen-mode of the waveguide. The polarization rotates to elliptic (if the crystal angle is not exactly 45 degrees, in that special case the polarization would rotate but be linear, like in a half-wave plate). The polarization will of course not rotate toward the propagation direction, which has no interaction with the Al band. The length of the a-axis stripe determines which polarization comes out at the next mirror. Although the embodiments above have been described in terms of a laser diode, the methods and device structures can also be applied to any light emitting diode device. Therefore, the above description and illustrations should not be taken as limiting the scope of the present invention which is defined by the appended claims.

In an example, the present method and system can also include use of one or more of a variety of wavelength conversion species.

Wavelength conversion materials can be ceramic or semiconductor particle phosphors, ceramic or semiconductor plate phosphors, organic or inorganic downconverters, upconverters (anti-stokes), nano-particles and other materials which provide wavelength conversion. Some examples are listed below:

-   -   (Srn,Ca1-n)10(PO4)6*B2O3:Eu2+ (wherein 0≤n≤1)     -   (Ba,Sr,Ca)5(PO4)3(Cl,F,Br,OH):Eu2+,Mn2+     -   (Ba,Sr,Ca)BPO5:Eu2+,Mn2+     -   Sr2Si3O8*2SrCl2:Eu2+     -   (Ca,Sr,Ba)3MgSi2O8:Eu2+, Mn2+     -   BaAl8O13:Eu2+     -   2SrO*0.84P2O5*0.16B2O3:Eu2+     -   (Ba,Sr,Ca)MgAl10O17:Eu2+,Mn2+     -   K2SiF6:Mn4+     -   (Ba,Sr,Ca)Al2O4:Eu2+     -   (Y,Gd,Lu,Sc,La)BO3:Ce3+,Tb3+     -   (Ba,Sr,Ca)2(Mg,Zn)Si2O7:Eu2+     -   (Mg,Ca,Sr,Ba,Zn)2Si1-xO4-2x:Eu2+ (wherein 0≤x≤0.2)     -   (Ca,Sr,Ba)MgSi2O6:Eu2+     -   (Sr,Ca,Ba)(Al,Ga)2S4:Eu2+     -   (Ca,Sr)8(Mg,Zn)(SiO4)4Cl2:Eu2+,Mn2+     -   Na2Gd2B2O7:Ce3+,Tb3+     -   (Sr,Ca,Ba,Mg,Zn)2P2O7:Eu2+,Mn2+     -   (Gd,Y,Lu,La)2O3:Eu3+,Bi3+     -   (Gd,Y,Lu,La)2O2S:Eu3+,Bi3+     -   (Gd,Y,Lu,La)VO4:Eu3+,Bi3+     -   (Ca,Sr)S:Eu2+,Ce3+     -   (Y,Gd,Tb,La,Sm,Pr,Lu)3(Sc,Al,Ga)5-nO12-3/2n:Ce3+ (wherein         0≤n≤0.5)     -   ZnS:Cu+,Cl−     -   (Y,Lu,Th)3Al5O12:Ce3+     -   ZnS:Cu+,Al3+     -   ZnS:Ag+,Al3+     -   ZnS:Ag+,Cl−     -   The group:         -   Ca1-xAlx-xySi1-x+xyN2-x-xyCxy:A         -   Ca1-x-zNazM(III)x-xy-zSi1-x+xy+zN2-x-xyCxy:A         -   M(II)1-x-zM(I)zM(III)x-xy-zSi1-x+xy+zN2-x-xyCxy:A         -   M(II)1-x-zM(I)zM(III)x-xy-zSi1-x+xy+zN2-x-xy-2w/3CxyOw-v/2Hv:A         -   M(II)1-x-zM(I)zM(III)x-xy-zSi1-x+xy+zN2-x-xy-2w/3-v/3CxyOwHv:A         -   wherein 0<x<1, 0<y<1, 0≤z<1, 0≤v<1, 0<w<1, x+z<1, x>xy+z,             and 0<x-xy-z<1,         -   M(II) is at least one divalent cation, M(I) is at least one             monovalent cation, M(III) is at least one trivalent cation,             H is at least one monovalent anion, and A is a luminescence             activator doped in the crystal structure.         -   LaAl(Si 6-z Al z)(N 10-z Oz):Ce3+ (wherein z=1)         -   (Ca, Sr) Ga2S4:Eu2+         -   AlN:Eu2+         -   SrY2S4:Eu2+         -   CaLa2S4:Ce3+         -   (Ba,Sr,Ca)MgP2O7:Eu2+,Mn2+         -   (Y,Lu)2WO6:Eu3+,Mo6+         -   CaWO4         -   (Y,Gd,La)2O2S:Eu3+         -   (Y,Gd,La)2O3:Eu3+         -   (Ba,Sr,Ca)nSinNn:Eu2+ (where 2n+4=3n)         -   Ca3(SiO4)Cl2:Eu2+         -   (Y,Lu,Gd)2-nCanSi4N6+nC1-n:Ce3+, (wherein 0≤n≤0.5)         -   (Lu,Ca,Li,Mg,Y) alpha-SiAlON doped with Eu2+ and/or Ce3+         -   (Ca,Sr,Ba)SiO2N2:Eu2+,Ce3+         -   Ba3MgSi2O8:Eu2+,Mn2+         -   (Sr,Ca)AlSiN3:Eu2+         -   CaAlSi(ON)3:Eu2+         -   Ba3MgSi2O8:Eu2+         -   LaSi3N5:Ce3+         -   Sr10(PO4)6Cl2:Eu2+         -   (BaSi)O12N2:Eu2+         -   M(II)aSibOcNdCe:A wherein (6<a<8, 8<b<14, 13<c<17, 5<d<9,             0<e<2) and M(II) is a divalent cation of             (Be,Mg,Ca,Sr,Ba,Cu,Co,Ni,Pd,Tm,Cd) and A of             (Ce,Pr,Nd,Sm,Eu,Gd,Tb,Dy,Ho,Er,Tm,Yb,Lu,Mn,Bi,Sb)         -   SrSi2(O,Cl)2N2:Eu2+         -   SrSi9Al19ON31:Eu2+         -   (Ba,Sr)Si2(O,Cl)2N2:Eu2+         -   LiM2O8:Eu3+ where M=(W or Mo)

For purposes of the application, it is understood that when a phosphor has two or more dopant ions (i.e. those ions following the colon in the above phosphors), this is to mean that the phosphor has at least one (but not necessarily all) of those dopant ions within the material. That is, as understood by those skilled in the art, this type of notation means that the phosphor can include any or all of those specified ions as dopants in the formulation.

Further, it is to be understood that nanoparticles, quantum dots, semiconductor particles, and other types of materials can be used as wavelength converting materials. The list above is representative and should not be taken to include all the materials that may be utilized within embodiments described herein.

While the above is a full description of the specific embodiments, various modifications, alternative constructions and equivalents may be used. Although the technique has been described in terms of a specific temperature range, there can be variations in some examples. Therefore, the above description and illustrations should not be taken as limiting the scope of the present invention which is defined by the appended claims. 

What is claimed is:
 1. A method for fabricating a light emitting device configured as a Group III-nitride based laser device, the method comprising: providing a substrate member comprising a gallium and nitrogen containing material and a surface region with a gallium containing epitaxial material overlying the surface region; forming a p-type (Al,In,Ga)N waveguiding material overlying the gallium containing epitaxial material under a predetermined process condition; maintaining the predetermined process condition such that an environment during a growth of the p-type (Al,In,Ga)N waveguiding material comprises a molecular H₂ to N₂ gas flow ratio of less than 1 to 10; and maintaining a temperature ranging from 725 C to 925 C during the formation of the p-type (Al,In,Ga)N waveguiding material, wherein the p-type (Al,In,Ga)N waveguiding material is characterized by a carbon impurity concentration of less than 1E17 atoms per cubic centimeter; and using the device in an application selected from laser display, metrology, communications, health care, and information technology.
 2. The method of claim 1 further comprising forming an active region overlying the gallium containing epitaxial material, the active region comprising of a plurality of quantum-well regions, each of the quantum-well regions being configured with a barrier material; and further comprising forming a p-type (Al,In,Ga)N electron blocking layer overlying the active region.
 3. The method of claim 1 further comprising forming an active region overlying the gallium containing epitaxial material, the active region comprising of a plurality of quantum-well regions, each of the quantum-well regions being configured with a barrier material; and further comprising forming an n-type waveguiding material underneath the active region.
 4. The method of claim 3 wherein the n-type waveguiding material is comprised of a material with a refractive index lower than an average refractive index of the active region but larger than indium gallium nitride with indium nitride alloy composition greater than 2% but less than 15%.
 5. The method of claim 4 wherein the n-type waveguiding material comprises an aluminum gallium nitride with aluminum nitride alloy compositions greater than 0% but less than 20%.
 6. The method of claim 1 further comprising forming an active region overlying the gallium containing epitaxial material, the active region comprising of a plurality of quantum-well regions, each of the quantum-well regions being configured with a barrier material; wherein the p-type (Al,In,Ga)N waveguiding material overlies the active region; and wherein the p-type (Al,In,Ga)N waveguiding material is comprised of a material with a refractive index lower than an average refractive index of the active region but larger than indium gallium nitride with indium nitride alloy composition greater than 2% but less than 15%.
 7. The method of claim 6 wherein the p-type (Al,In,Ga)N waveguiding material comprises aluminum gallium nitride with aluminum nitride alloy compositions greater than 0% but less than 20%.
 8. The method of claim 1 further comprising forming an active region overlying the gallium containing epitaxial material, the active region comprising of a plurality of quantum-well regions, each of the quantum-well regions being configured with a barrier material; wherein the active region comprises defect suppression regions.
 9. The method of claim 1 wherein the p-type (Al,In,Ga)N waveguiding material has a thickness from 400 to 1000 nanometer with Mg doping level of 5E17 to 2E19 atoms per cubic centimeter, the p-type (Al,In,Ga)N waveguiding material being configured as a waveguiding material and a cladding region.
 10. The method of claim 1 further comprising forming a highly Mg doped p++ contact layer with a thickness greater than 5 nanometer but lower than 50 nanometer overlying the p-type (Al,In,Ga)N waveguiding material.
 11. The method of claim 1 further comprising introducing a metallorganic or a combination of metallogranic precursors consisting of a group including trimethylgallium, triethylgallium, trimethylaluminum, trimethylindium, or Bis(cyclopentadienyl)magnesium while forming the p-type (Al,In,Ga)N waveguiding material; and wherein the p-type (Al,In,Ga)N waveguiding material is grown using MOCVD or MBE.
 12. The method of claim 1 wherein the substrate member is configured on a nonpolar (10-10), (11-20), or a related miscut orientation.
 13. The method of claim 1 wherein the substrate member is configured on polar (0001) or (000-1), or a related miscut orientation.
 14. The method of claim 1 wherein the substrate member is configured on a semipolar (20-21), (20-2-1), (30-31), (30-3-1), (11-22), or a related miscut orientation.
 15. The method of claim 1 wherein the substrate member comprises a misfit dislocation blocking feature.
 16. The method of claim 1 further comprising forming a conductive oxide material comprising either an indium tin oxide material or a zinc oxide material overlying the p-type (Al,In,Ga)N waveguiding material; and forming a metallization layer selected from at least one of Au, Ni, Pd, Al, Pt, or Ti overlying the conductive oxide material.
 17. The method of claim 1 wherein a diode voltage of the light emitting device is less than 6.75 V at a current density of 14 kA/cm².
 18. The method of claim 1 wherein an area on the substrate member affected by dark spot defects is less than 10%.
 19. A method for fabricating a light emitting device configured as a Group III-nitride based laser device, the method comprising: providing a substrate member comprising a gallium and nitrogen containing material and a surface region with a gallium containing epitaxial material overlying the surface region; forming a first p-type (Al,In,Ga)N waveguiding material overlying the gallium containing epitaxial material under a first predetermined process condition; maintaining the first predetermined process condition such that an environment during a growth of the first p-type (Al,In,Ga)N waveguiding material is substantially molecular N₂ rich gas environment; maintaining a temperature ranging from 725 C to 925 C during the formation of the first p-type (Al,In,Ga)N waveguiding material; and forming a second p-type (Al,In,Ga)N waveguiding material overlying the gallium containing epitaxial material under a second predetermined process condition, wherein the second predetermined process condition comprises a non-substantially molecular N₂ rich gas environment; and using the device in an application selected from laser display, metrology, communications, health care, and information technology.
 20. A method for fabricating a light emitting device configured as a Group III-nitride based laser device, the method comprising: providing a substrate member comprising a gallium and nitrogen containing material and a surface region with a gallium containing epitaxial material overlying the surface region; forming a p-type (Al,In,Ga)N waveguiding material overlying the gallium containing epitaxial material under a predetermined process condition; maintaining the predetermined process condition such that an environment surrounding a growth of the p-type (Al,In,Ga)N waveguiding material is substantially molecular N₂ rich gas environment; and maintaining a temperature ranging from 725 C to 925 C during the formation of the p-type (Al,In,Ga)N waveguiding material, whereupon the predetermined process condition is substantially free from molecular H₂ gas, the p-type (Al,In,Ga)N waveguiding material is formed using a trimethylgallium metallorganic precursor and/or a triethylgallium metallorganic precursor; wherein the p-type (Al,In,Ga)N waveguiding material is formed at the predetermined process condition including an ammonia containing species, whereupon a ratio of the ammonia containing species to the substantially molecular N₂ rich gas is greater than 1:5 but less than 2:3; and using the device in an application selected from laser display, metrology, communications, health care, and information technology. 